diff --git a/Modules/CheckTypeSize.cmake b/Modules/CheckTypeSize.cmake
index 2b07b7cc03..17beadcb10 100644
--- a/Modules/CheckTypeSize.cmake
+++ b/Modules/CheckTypeSize.cmake
@@ -89,25 +89,7 @@ function(__check_type_size_impl type var map builtin language)
     message(CHECK_START "Check size of ${type}")
   endif()
 
-  # Include header files.
-  set(headers)
-  if(builtin)
-    if(HAVE_SYS_TYPES_H)
-      string(APPEND headers "#include <sys/types.h>\n")
-    endif()
-    if(HAVE_STDINT_H)
-      string(APPEND headers "#include <stdint.h>\n")
-    endif()
-    if(HAVE_STDDEF_H)
-      string(APPEND headers "#include <stddef.h>\n")
-    endif()
-  endif()
-  foreach(h ${CMAKE_EXTRA_INCLUDE_FILES})
-    string(APPEND headers "#include \"${h}\"\n")
-  endforeach()
-
-  # Perform the check.
-
+  # Perform language check
   if(language STREQUAL "C")
     set(src ${CMAKE_BINARY_DIR}${CMAKE_FILES_DIRECTORY}/CheckTypeSize/${var}.c)
   elseif(language STREQUAL "CXX")
@@ -115,6 +97,37 @@ function(__check_type_size_impl type var map builtin language)
   else()
     message(FATAL_ERROR "Unknown language:\n  ${language}\nSupported languages: C, CXX.\n")
   endif()
+
+  # Include header files.
+  set(headers)
+  if(builtin)
+    if(language STREQUAL "CXX" AND type MATCHES "^std::")
+      if(HAVE_SYS_TYPES_H)
+        string(APPEND headers "#include <sys/types.h>\n")
+      endif()
+      if(HAVE_CSTDINT)
+        string(APPEND headers "#include <cstdint>\n")
+      endif()
+      if(HAVE_CSTDDEF)
+        string(APPEND headers "#include <cstddef>\n")
+      endif()
+    else()
+      if(HAVE_SYS_TYPES_H)
+        string(APPEND headers "#include <sys/types.h>\n")
+      endif()
+      if(HAVE_STDINT_H)
+        string(APPEND headers "#include <stdint.h>\n")
+      endif()
+      if(HAVE_STDDEF_H)
+        string(APPEND headers "#include <stddef.h>\n")
+      endif()
+    endif()
+  endif()
+  foreach(h ${CMAKE_EXTRA_INCLUDE_FILES})
+    string(APPEND headers "#include \"${h}\"\n")
+  endforeach()
+
+  # Perform the check.
   set(bin ${CMAKE_BINARY_DIR}${CMAKE_FILES_DIRECTORY}/CheckTypeSize/${var}.bin)
   configure_file(${__check_type_size_dir}/CheckTypeSize.c.in ${src} @ONLY)
   try_compile(HAVE_${var} ${CMAKE_BINARY_DIR} ${src}
@@ -232,8 +245,13 @@ macro(CHECK_TYPE_SIZE TYPE VARIABLE)
       check_include_file(stddef.h HAVE_STDDEF_H)
     elseif(_language STREQUAL "CXX")
       check_include_file_cxx(sys/types.h HAVE_SYS_TYPES_H)
-      check_include_file_cxx(stdint.h HAVE_STDINT_H)
-      check_include_file_cxx(stddef.h HAVE_STDDEF_H)
+      if("${TYPE}" MATCHES "^std::")
+        check_include_file_cxx(cstdint HAVE_CSTDINT)
+        check_include_file_cxx(cstddef HAVE_CSTDDEF)
+      else()
+        check_include_file_cxx(stdint.h HAVE_STDINT_H)
+        check_include_file_cxx(stddef.h HAVE_STDDEF_H)
+      endif()
     endif()
   endif()
   unset(_CHECK_TYPE_SIZE_BUILTIN_TYPES_ONLY)