diff --git a/Modules/Compiler/SunPro-C.cmake b/Modules/Compiler/SunPro-C.cmake
index 29c2f22f9f..8d0e6d6985 100644
--- a/Modules/Compiler/SunPro-C.cmake
+++ b/Modules/Compiler/SunPro-C.cmake
@@ -18,6 +18,8 @@ string(APPEND CMAKE_C_FLAGS_MINSIZEREL_INIT " -xO2 -xspace -DNDEBUG")
 string(APPEND CMAKE_C_FLAGS_RELEASE_INIT " -xO3 -DNDEBUG")
 string(APPEND CMAKE_C_FLAGS_RELWITHDEBINFO_INIT " -g -xO2 -DNDEBUG")
 
+set(CMAKE_DEPFILE_FLAGS_C "-xMD -xMF <DEPFILE>")
+
 # Initialize C link type selection flags.  These flags are used when
 # building a shared library, shared module, or executable that links
 # to other libraries to select whether to use the static or shared
diff --git a/Modules/Compiler/SunPro-CXX.cmake b/Modules/Compiler/SunPro-CXX.cmake
index 5cb7edcede..14196b71dc 100644
--- a/Modules/Compiler/SunPro-CXX.cmake
+++ b/Modules/Compiler/SunPro-CXX.cmake
@@ -18,6 +18,8 @@ string(APPEND CMAKE_CXX_FLAGS_MINSIZEREL_INIT " -xO2 -xspace -DNDEBUG")
 string(APPEND CMAKE_CXX_FLAGS_RELEASE_INIT " -xO3 -DNDEBUG")
 string(APPEND CMAKE_CXX_FLAGS_RELWITHDEBINFO_INIT " -g -xO2 -DNDEBUG")
 
+set(CMAKE_DEPFILE_FLAGS_CXX "-xMD -xMF <DEPFILE>")
+
 # Initialize C link type selection flags.  These flags are used when
 # building a shared library, shared module, or executable that links
 # to other libraries to select whether to use the static or shared
diff --git a/Modules/Compiler/XL.cmake b/Modules/Compiler/XL.cmake
index e527a049eb..3361f8f709 100644
--- a/Modules/Compiler/XL.cmake
+++ b/Modules/Compiler/XL.cmake
@@ -30,6 +30,8 @@ macro(__compiler_xl lang)
   set(CMAKE_${lang}_CREATE_PREPROCESSED_SOURCE "<CMAKE_${lang}_COMPILER> <DEFINES> <INCLUDES> <FLAGS> -E <SOURCE> > <PREPROCESSED_SOURCE>")
   set(CMAKE_${lang}_CREATE_ASSEMBLY_SOURCE     "<CMAKE_${lang}_COMPILER> <DEFINES> <INCLUDES> <FLAGS> -S <SOURCE> -o <ASSEMBLY_SOURCE>")
 
+  set(CMAKE_DEPFILE_FLAGS_${lang} "-MF <DEPFILE> -qmakedep=gcc")
+
   # CMAKE_XL_CreateExportList is part of the AIX XL compilers but not the linux ones.
   # If we found the tool, we'll use it to create exports, otherwise stick with the regular
   # create shared library compile line.